P Emflon Filter

Summary

Product identification

The P Emflon® Filter is a microlithography filter specifically recommended for bulk filtration of photoresists and chemicals compatible with PTFE and high density polyethylene (HDPE). It utilizes the Ultipleat® filter configuration.

Key features:

• Wide range of configurations
• High flow rates
• Integrity testable
• Low extractables
• Optimized design
• Manufactured in a cleanroom environment
• 100% integrity tested

Materials

• Medium: PTFE
• Core, cage, and end caps: High density polyethylene (HDPE)
• Support and drainage: High density polyethylene (HDPE)
• O-ring options: Viton and Teflon encapsulated Viton. Ethylene propylene is also listed for some part numbers.

Filtration performance

Removal Ratings:

• 10 µm
• 5 µm
• 0.2 µm
• 0.1 µm
• 0.05 µm

Integrity Test Values (per 254 mm / 10 in segment):

• 0.05 µm: < 50 mL / min @ 0.12 MPa / 17.5 psig (Test fluid: 60:40, IPA:H₂O)
• 0.1 µm: < 20 mL / min @ 0.1 MPa / 15 psig (Test fluid: 60:40, IPA:H₂O)

Operating limits

• Maximum temperature: 70°C / 158°F
• Maximum forward/reverse differential pressure: 0.41 MPa @ 70°C / 60 psid @ 158°F

Mechanical / hydraulic

Filter Areas:

• 254 mm / 10 in: 1.07 m² / 11.5 ft²

Configurations:

• Nominal length: 229 mm / 9 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in and 1016 mm / 40 in
• Diameter: 70 mm / 2.75 in
• O-ring size / end caps:
  • Code 3: 222 double O-ring / flat end
  • Code 8: 222 double O-ring / finned end
  • Code 7: 226 double O-ring / bayonet lock / finned end
  • MR Code 3: 222 double O-ring / flat end designed to retrofit Code 0 elements

Ordering Information

A table of part numbers is provided, detailing removal rating, nominal length, configuration code, and O-ring material for various models. See the official PDF for exact tabulated values.

Additional lengths (508 mm / 20 in, 762 mm / 30 in, and 1016 mm / 40 in) are available by modifying the fourth digit of the part number to a 2, 3 or 4 respectively. Other O-ring materials are also available.

Pressure drop vs. liquid flow rate curves are available in the official PDF. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.

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Disclaimer: This summary is based on extracted text and may omit figures, footnotes, or the latest revisions. For contractual data, always refer to the specific OEM PDF revision used on your project.

Official datasheet (PDF)

Lenntech datasheet mirror