CMPure and CMPD Filter Cartridges

Summary

Product identification

The CMPure and CMPD Series Filter Cartridges are advanced melt blown depth cartridges specifically optimized for Chemical Mechanical Planarization (CMP) slurry systems. They feature proprietary CoLD fiber melt blowing technology, which integrates Co-Located Large Diameter fibers within the fine fiber matrix to produce a rigid structural network.

Key features:

• All polypropylene construction
• Continuous gradient pore structure for built-in prefiltration
• Compatible with metal (W, Cu, Al), oxide and STI slurries
• Also available as disposable filter capsules

Operating limits

• Maximum temperature: 180˚F / 82˚C
• Maximum differential pressure:
  • 60 psid @ 86˚F / 4 bar @ 30˚C
  • 30 psid @ 150˚F / 2 bar @ 66˚C
  • 15 psid @ 180˚F / 1 bar @ 82˚C

Mechanical / hydraulic

Materials

• Medium: Polypropylene
• Core, cage and end caps: Polypropylene
• O-ring options: EPDM, Fluorocarbon elastomer

Removal Ratings

• 0.5 µm
• 2 µm
• 5 µm
• 10 µm
• 15 µm
• 20 µm
• 30 µm
• 50 µm

Configurations

• Nominal lengths:
  • 4" / 102 mm
  • 10" / 254 mm
  • 20" / 508 mm
  • 30" / 762 mm
  • 40" / 1016 mm
• Diameter: 2.6" / 66 mm

Pressure Drop vs. Liquid Flow Rate

The datasheet includes a graph illustrating clean pressure drop (psid or mbar) versus liquid flow rate (gpm or L/min) per 10" / 254 mm filter for various removal ratings (0.5 µm, 2 µm, 5 µm, 10 µm, 15 µm, 20 µm, 30 µm, 50 µm). For liquids with viscosities differing from water, the pressure drop should be multiplied by the viscosity in centipoise. See the official PDF for exact tabulated values from the graph.

Part Numbers / Ordering Information

• Removal Rating (µm)
  • 0.5: 0.5
  • 2: 2
  • 5: 5
  • 10: 10
  • 15: 15
  • 20: 20
  • 30: 30
  • 50: 50
• Nominal Length (in / mm)
  • 4: 4 / 102
  • 10: 10 / 254
  • 20: 20 / 508
  • 30: 30 / 762
  • 40: 40 / 1016
• Material of Construction
  • U: Polypropylene
• Cartridge End Configuration
  • M3: SOE flat closed end, 222 O-rings
  • H21: Double open end, polypropylene and ethylene propylene co-polymer seal
• O-ring Material
  • E: EPDM
  • F: PTFE encapsulated fluorocarbon elastomer
  • V: Fluorocarbon elastomer

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Disclaimer: This summary is based on extracted text and may not include all figures, footnotes, or the latest revisions of the OEM PDF datasheet. For contractual data, always refer to the specific OEM PDF revision used on your project.

Official datasheet (PDF)

Lenntech datasheet mirror